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Devices, Instrumentation and Methods

 
FEI Scios

DualBeam FEI Scios

  • SEM-FIB device for 3D investigations
  • EDAX analytics with EDS, WDS and EBSD for chemical analyses and crystallographic investigations
  • in-situ tensile/compression testing up to 5 kN
  • in-situ heating stage up to 1000 °C
 
FEI XL30

FEI XL30

  • field emission cathode Scanning Electron Microscope
  • EDAX analytics with EDS and EBSD for chemical analyses and crystallographic investigations
 
Rasterelektronenmikrosop

Zeiss EVO 15

  • Scanning Electron Microscope with EDS for materials characterization
 
 Sputteranlage Quorum Q150T ES

 

Quorum Q150T ES sputtering device

  • sputtering device for SEM preparation of non-conductive samples
  • target materials: chromium, platinum, tantalum, titanium
  • gas: argon
 
 Sputteranlage Emitech K550

 

Emitech K550 sputtering device

  • sputtering device for SEM preparation of non-conductive samples
  • target material: gold
  • gas: argon
 
Mikrohärtprüfer Buehler VH3300

Buehler VH3300 automatic microhardness tester

  • microhardness testing according to Vickers
  • automatic rotating turret, magnifications: 5x to 200x
  • 4-position sample clamping device (sample diameter: 20/30 mm)
  • measuring range: HV0,01 - HV5
  • analysis software: DiaMet
 

ELMA 1

ELMA 2

Experimental lab for materials analysis methods

  • new and advanced development of microscopic and analytical methods
  • development and testing of X-ray sources for X-ray fluorescence analysis (XRF)
  • imagigng X-ray methods
  • X-ray spectroscopy

Last Modification: 11.02.2026 -
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